マイクロエレクトロニクス部品の精密切断


Diamond Wire Cutting Systems for High-Precision Component Slicing

Microelectronic components and precision substrates experience extreme stress during high-speed slicing. To ensure ultra-high precision, minimal sub-surface damage and avoid chip cracking that lead to performance loss, device manufacturers require stable cutting dynamics and precise process control. This is the only way to achieve reliable, high-yield production of microelectronic components.

Microelectronic processing involves high material and production costs. Around 30% of total manufacturing cost is attributed to inefficient cutting, excessive kerf loss and low yield. The application-specific selection of ewirexon diamond wire cutting systems can therefore make a decisive contribution to reducing production costs.

High-precision wire saws are used to slice hard, brittle components into thin wafers with stable tension control. Their operating parameters typically lie in the optimal process window, which is characterized by consistent tension, low vibration and narrow cutting width.

マイクロエレクトロニクス部品の精密切断

ewirexon Microelectronic Component Precision Cutting Diamond Wire Saw

The new Microelectronic Component Precision Cutting diamond wire saws from ewirexon are specially developed for high-precision slicing of microelectronic components and brittle-hard substrates, where ultra-high cutting accuracy and minimal material loss are required. The new Microelectronics Series achieves significantly higher cutting precision and material yield than competitor products in this application area. The use of our cutting systems enables savings in production costs for microelectronic manufacturers. Another positive side effect is the reduction of material waste and surface damage.

  • Potential savings in production costs through higher material yield of the cutting systems in typical microelectronics processing lines
  • Optimum use of resources
  • Material cost savings in production due to minimal kerf loss and sub-surface damage
  • Flexible and compact equipment design possible due to modular structure and small footprint
  • Easier handling during installation and maintenance thanks to user-friendly operation and remote monitoring
  • Reduction of maintenance costs through longer service life of the diamond wire and machine components
  • Economical turnkey system solutions thanks to customized process parameters and full system integration
  • マイクロエレクトロニクス部品の精密切断
  • Semiconductor Wafer Slicing
  • Precision Substrate Processing
  • Brittle-Hard Material Cutting
  • R&D Labs & Pilot Production Lines
  • Advanced Packaging & Microfabrication Facilities
NO.パラメータ仕様
1モデル(カスタマイズ可能、例:EW-200)
2切断の原理ダイヤモンドワイヤーによる機械式冷間切断
3切断機能スライス
4ワークピースの最大寸法(長さ×幅×高さ)150 × 150 × 150 mm
5作業台のサイズ(長さ×幅)160 × 160 mm
6切断平坦度精度≤ 0.1 mm
7表面粗さRa 0.8 μm
8ダイヤモンドワイヤーの仕様Φ0.5 × 1797 mm(直径範囲:0.35~0.8 mm)
9テンションシステムサーボ式張力制御
10ガイドホイールの数量3つの車輪
11駆動モーター特注サーボモーター
12主軸回転数4500 rpm
13主モーター出力1.1 kW
14総消費電力1.5 kW
15電源220 V / 50 Hz
16制御システム自社開発のTongcheng T30
17外形寸法(長さ×幅×高さ)約 850 × 800 × 950 mm
18総重量約560kg
ewirexon - ewirexon precision diamond wire cutting system

Case Study: Microelectronic Component Precision Cutting

This case study shows how the optimal selection of ewirexon diamond wire cutting systems can help boost cutting accuracy for microelectronic components by up to 99.9% and thus sustainably lower the production costs of advanced semiconductor fabs. In addition, ewirexon’s precision cutting solution delivers minimal material loss, ultra-smooth surface quality and higher production throughput compared to conventional cutting methods.

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ニュース&最新情報

Thick glass core substrate blank being prepared with an endless diamond wire saw and controlled coolant

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